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Liquid crystal polymer composite films for reconfigurable photomasking applications
Please use this identifier to cite or link to this item:
http://hdl.handle.net/1860/2631
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| Title: | Liquid crystal polymer composite films for reconfigurable photomasking applications |
| Authors: | Fox, Anna E.
Fontecchio, Adam K. |
| Issue Date: | 2007 |
| Publisher: | American Institute of Physics |
| Citation: | Applied Physics Letters. 91, pp: 141119. |
| Abstract: | We show proof of concept of a real-time reconfigurable photomask fabricated from holographically
formed polymer-dispersed liquid crystal !H-PDLC" reflection gratings on etched indium tin oxide
patterned electrodes. H-PDLC films were formed using a thiolene based polymer to have a reflection
wavelength that modulates 440 nm, the peak sensitivity wavelength of Shipley 1800 series positive
photoresist. A working prototype of this adaptable photomask device is shown by comparing
patterns formed using the H-PDLC mask and similar patterns formed using a static contact
photomask showing that H-PDLC films have the ability to modulate 440 nm light and control the
exposure dose of photoresist. |
| URI: | http://hdl.handle.net/1860/2631 |
| Appears in Collections: | Faculty Research and Publications (ECE)
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